Global Modeling and Peripheral Plasma

In the first part of this book, an improved volume-
averaged global model is developed for a cylindrical
electronegative plasma that is applicable over a wide
range of electron densities, electronegativities, and
pressures. It is applied to steady and pulsed-power
oxygen discharges. The model incorporates effective
volume and surface loss factors for ions and
electrons combining three EN discharge regimes
spanning the plasma parameters and gas pressures of
interest.
The second part explores both theoretically and
experimentally a capacitive discharge connected
through a dielectric or metal slot to a peripheral
grounded region, which is used in commercial dual
frequency capacitive discharges. Ignition of the
peripheral plasma produces effects that are
detrimental to processing performance. Discharge
models are developed for diffusion and plasma
maintenance in the slot, and plasma maintenance in
the periphery. The theoretical predictions of
ignition conditions are compared with experimental
results. Instabilities associated with the loss of
confinement are discovered, and a physical model is
proposed.

Autorentext

Ph.D in Electrical Engineering, Researched on plasma modeling and experiments at University of California, Berkeley. Worked as the semiconductor thin film technologiest at Samsung Electronics and AMD/Spansion.

Klappentext

In the first part of this book, an improved volume-averaged global model is developed for a cylindrical electronegative plasma that is applicable over a wide range of electron densities, electronegativities, and pressures. It is applied to steady and pulsed-power oxygen discharges. The model incorporates effective volume and surface loss factors for ions and electrons combining three EN discharge regimes spanning the plasma parameters and gas pressures of interest.The second part explores both theoretically and experimentally a capacitive discharge connected through a dielectric or metal slot to a peripheral grounded region, which is used in commercial dual frequency capacitive discharges. Ignition of the peripheral plasma produces effects that are detrimental to processing performance. Discharge models are developed for diffusion and plasma maintenance in the slot, and plasma maintenance in the periphery. The theoretical predictions of ignition conditions are compared with experimental results. Instabilities associated with the loss of confinement are discovered, and a physical model is proposed.