Outlook and Challenges of Nano Devices, Sensors, and MEMS

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.

Explains the interaction of nanascale structures and electrical and/or optical behavior of novel semiconductor devices, MEMS, and sensors Describes processes and materials needed to fabricate the nano devices discussed Discusses design, modeling and simulation for optimizing the performance of nanoscale devices Examines the effect of nanoscale structures on the reliability of nano devices Includes supplementary material: sn.pub/extras

Autorentext

Juin J. Liou received the B.S. (honors), M.S., and Ph.D. degrees in electrical engineering from the University of Florida, Gainesville, in 1982, 1983, and 1987, respectively. In 1987, he joined the Department of Electrical and Computer Engineering at the University of Central Florida (UCF), Orlando, Florida where he is now the Pegasus Distinguished Professor, Lockheed Martin St. Laurent Professor, and UCF-Analog Devices Fellow. His current research interests are Micro/nanoelectronics computer-aided design, RF device modeling and simulation, and electrostatic discharge (ESD) protection design, modeling and simulation. Dr. Liou holds 8 U.S. patents (3 more filed and pending), and has published 9 books, more than 260 journal papers (including 17 invited review articles), and more than 210 papers (including 90 keynote and invited papers) in international and national conference proceedings.

Inhalt

Introduction.- High-k dielectric for nanoscale MOS devices.- Performance, optimization, and reliability of FinFET devices.- Performance, optimization, and challenges of emerging nanowire field-effect transistors.- Graphene technology for future MEMS and sensor applications.- Nanoscale sensors for next-generation optical transceiver applications.- Nanoscale MEMS for future optical communication applications.- Nanoscale devices for biomedical applications.- Effect of nanoscale structure on reliability of nano devices and sensors.- Compact modeling of nano devices and sensors.- Three-dimensional TCAD simulation of nano semiconductor devices.- Fabrication of nano devices based on novel material.- Novel processing technology for fabricating nano devices and sensors.- Conclusions.