Advanced MEMS/NEMS Fabrication and Sensors

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development.

• Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors;
• Covers a broad spectrum of sensor applications;

• Written by leading experts in the field.

  Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors Covers a broad spectrum of sensor applications Written by leading experts in the field

  Autorentext

  Zhuoqing Yang, PhD, received his BSc and MSc degrees in electromechanical engineering from Harbin Engineering University (HEU), Harbin, China, and his PhD in microelectronics and solid state electronics from Shanghai Jiao Tong University (SJTU). He was as an Assistant Professor at SJTU before becoming a JSPS Postdoctoral Fellow at the National Institute of Advanced Industrial Science and Technology (AIST) in Japan from 2011 to 2013. He returned to SJTU in 2014, where he is now a Full Professor in the School of Electronic Information and Electrical Engineering. Dr. Yang is also Resident Researcher at the National Key Laboratory of Science and Technology on Micro/Nano Fabrication, China. His research is focused on the design, simulation and fabrication of MEMS/NEMS sensors and actuators and 3D fabrications on the surface of flexible fiber for biomedical applications. Dr. Yang is an active Senior Member of the IEEE, a frequent contributor to international journals and conferences, and an editorial board member for the Micro and Nanosystems (MNS) and The Open Materials Science Journal.

  Inhalt
  Tip-based Nanofabrication for MEMS Devices.- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing.- Application of Non-template Special Nanostructure Fabrication Technology in Sensors.- Composite Micro-machining Technology on the Non-silicon MEMS.- Nano-in-Nano Integration for Nanofluidics.- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices.- NEMS Sensors Based on Novel Nanomaterials.- Microfluidic Sensors in Surface Channel Technology.- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System.- Bio-inspired Flexible Sensors for Flow Field Detection.- Ultrasound MEMS for Biosensing and Biomedical Imaging.- Optofluidic Devices for Bio-analytical Applications.