Capacitive Micromachined Ultrasonic Transducers: Analysis and Design

This book presents the design and analysis for development of a Capacitive Micromachined Ultrasonic Transducer (CMUT), a novel sensor and actuator, aimed at replacing the conventional piezoelectric transducers for air-coupled ultrasonic imaging applications. These CMUTs are fabricated using the silicon micromachining technology wherein all fabrication is done on the surface of a silicon wafer by means of thin-film depositions, patterning with photolithography and etching. The main emphasis of this study is on developing analytical models that serve as effective design tools for the development of these devices. A desirable goal this manuscript is to create reasonable mathematical models, obtain analytical solutions, wherever possible, for various measures of transducer performance and provide design aids.

Autorentext

Babar Ahmad received his M.E. and PhD degrees in Mechanical Engineering from the Indian Institute of Science, Bangalore, India. He is currently working as a Professor in the Department of Mechanical Engineering, National Institute of Technology, Srinagar. His current research involves the design and development of a MEMS ultrasonic transducer.