DIY MEMS

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources.

Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information

Autorentext

Dr. Deborah Munro is a Senior Lecturer in the bioengineering track within the mechanical engineering department at the University of Canterbury, Christchurch, and has more than 30 years of experience in mechanical and biomedical engineering. She earned her bachelor's degree in mechanical engineering from the University of the Pacific, her master's degree in mechanical engineering from Stanford University, and her doctorate in biological systems engineering from the University of California at Davis.

Inhalt
Introduction.- National Nanotechnology Coordinated Infrastructure (NNCI).- Working in a Cleanroom.- MEMS Fabrication Process.- Equipment.- Tools and Supplies.- Designing for MEMS.- Soft Materials.- Imaging & Metrology.- Testing.- Transporting.- Regulatory Approval Pathways.- Locations of the Facilities.- Meet the Lab Directors.- Collaborating with a Facility.- International Options.- Intellectual Property.- Getting Project Assistance.- Costs.- Taking the First Steps