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Epitaxy
CHF 57.25
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SKU
L330A22676P
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Geliefert zwischen Mo., 10.11.2025 und Di., 11.11.2025
Details
Epitaxy refers to the method of depositing a monocrystalline film on a monocrystalline substrate. The deposited film is denoted as epitaxial film or epitaxial layer. The term epitaxy comes from the Greek roots epi, meaning "above", and taxis, meaning "in ordered manner". It can be translated "to arrange upon". Epitaxial films may be grown from gaseous or liquid precursors. Because the substrate acts as a seed crystal, the deposited film takes on a lattice structure and orientation identical to those of the substrate. This is different from other thin-film deposition methods which deposit polycrystalline or amorphous films, even on single-crystal substrates. If a film is deposited on a substrate of the same composition, the process is called homoepitaxy; otherwise it is called heteroepitaxy. Homoepitaxy is a kind of epitaxy performed with only one material. In homoepitaxy, a crystalline film is grown on a substrate or film of the same material. This technology is used to grow a film which is more pure than the substrate and to fabricate layers having different doping levels. In academic literature, homoepitaxy is often abbreviated to "homoepi".
Weitere Informationen
- Allgemeine Informationen
- GTIN 09786130713690
- Editor Frederic P. Miller, Agnes F. Vandome, John McBrewster
- Genre Chemie
- EAN 9786130713690
- Format Fachbuch
- Titel Epitaxy
- Herausgeber Alphascript Publishing
- Anzahl Seiten 132
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