Fundamentals of Nanomechanical Resonators

This authoritative book introduces and summarizes the latest models and skills required to design and fabricate nanomechanical resonators with a focus on nanomechanical sensing. It also establishes the theoretical foundation for courses on micro and nanomechanics. This book takes an applied approach to nanomechanics, providing a complete set of mechanical models, including strings and membrane resonators. Also discussed are quality factors, noise issues, transduction techniques, nanomechanical sensing, fabrication techniques, and applications for all common nanomechanical resonator types. It is an ideal book for students and researchers working with micro and nanomechanical resonators.

Reviews exhaustively the key recent research into the design and fabrication of micro and nanomechanical resonators Provides a complete set of mechanical models, including strings and membrane resonators Maximizes reader insights into nanomechanical sensing, transduction, and noise and measurements for micro and nanomechanical resonators

Autorentext

Silvan Schmid, Dr. sc., is a Full Professor of Micro and Nanotechnology at the Technical University of Vienna (TU Wien), where he leads the Research Unit of Micro and Nanosensors at the Institute of Sensor and Actuator Systems. Before that, he was an Assistant Professor and later an Associate Professor at the Technical University of Denmark (DTU). Professor Schmid is the co-founder and scientific advisor of the TU Wien spin-off Invisible-Light Labs GmbH, founded in 2019. His research focuses on micro- and nanomechanical resonators for sensor applications and fundamental research. Guillermo Villanueva, Ph.D., is Professor at Ecole Polytechnique Federale de Lausanne (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL, he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US) and a post-doc at EPFL-LMIS1. Professor Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertisefrom the design and fabrication to the characterization and applicability. Michael Lee Roukes, Ph.D., is Frank J. Roshek Professor of Physics, Applied Physics, and Bioengineering at the California Institute of Technology (Caltech). He was founding Director of Caltech's Kavli Nanoscience Institute from 2003-2006 and Co-Director from 2008-2013. Professor Roukes' scientific interests range from fundamental science to applied biotechnology - with a unifying theme centered on the development, application, and very-large-scale integration of complex nanostructures.

Inhalt
Resonance Frequency.- Quality Factor.- Responsivity.- Transduction.- Measurement and Noise.