Handbook of Thin Film Technology

Handbook of Thin Film Technology covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Serves as a practical handbook with a focus on the methods of thin film generation and measurement Ideal for reference as well as for self-study Includes an introduction to the physical foundations and applications in nanotechnology

Inhalt

Applications and developments of thin film technology.- Importance of the vacuum technology for thin film coatings.- Evaporation in the vacuum.- Basic principle of plasma physics.- Gaseous phase and surface processes.- Coating by cathode sputtering.- Plasma treatment methods.- Ion beam-supported procedures.- Chemical Vapor Deposition (CVD).- Physical basics of modern methods of surface and thin film analysis.- Measurements of thin layers during the coating.- Measurements of thin layers after terminated coating process.- Nanoparticle Films.- Optical properties of thin films. <p