High Frequency Electrochemical Micromachining

Microsystem and integrated circuitry components are mostly manufactured using semiconductor technologies. Fabrication using high strength metals, for demanding aerospace, mechanical, or biomedical applications, requires novel technologies which are different from those for silicon. A promising mass production method for micro/meso scale components is electrochemical micromachining. The complex system, however, requires high precision mechanical fixtures and sophisticated instrumentation for proper process control. This work presents an electrochemical micromachining system with a closed-loop feedback control, programmed using a conditional binary logic approach to improve material removal rate, decrease machining variation and reduce workpiece damage.

Autorentext

The author received his B.S. degree in mechatronics engineering from Sabanci University, Turkey in 2006 and his M.S. degree in mechanical engineering from Texas A&M University in 2008. He is currently a Ph.D. candidate at the University of Michigan, Ann Arbor. His research interests include MEMS, micro/nano manufacturing, and control systems.