Micro Mechanical Systems

Klappentext In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. Inhaltsverzeichnis Introduction Photolithographic Microfabrication Micromaching by Machine Tools Tribological Aspects of Microsystems Silicon Microsensors Micro-Actuators for Micro-Robots: Electric and Magnetic Energy Source and Power Supply Method Control Method of Micro Mechanical Systems Examples of Microsystems Future Problems

Zusammenfassung
Divided into ten sections, this book describes the principles and technology of Micro Mechanical Systems. It also provides an introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems.

Inhalt

Introduction
Photolithographic Microfabrication
Micromaching by Machine Tools
Tribological Aspects of Microsystems
Silicon Microsensors
Micro-Actuators for Micro-Robots: Electric and Magnetic
Energy Source and Power Supply Method
Control Method of Micro Mechanical Systems
Examples of Microsystems
Future Problems