Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems

This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided into eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, microfabrication technology of non-silicon materials, MEMS microsensors, MEMS microactuators, recent developments in biomedical, telecommunication, and aerospace fields. This book combines process principles and application examples with rigorous logic. It is suitable for basic learning and knowledge expansion for readers majoring in mechanical engineering, instrument science and technology, electronic science and technology, and physics.

Discusses knowledge points in order of concept, principle, microdevice manufacturing, and application Includes a lot of detailed cases to help readers with a profound understanding of micro-nano process Combines process principles and application examples with rigorous logic

Autorentext

Prof. Jingmin Li is currently a professor at Dalian University of Technology. His research interest covers MEMS/NEMS, high power microbatteries, and multiscale numerical simulation. He has published 120+ journal papers, 1 book, 2 book chapters and been granted 45 China patents. He is currently the PI of the National Key Research and Development Program Project and other 4 projects. He wins the Second Class Prize of the 2022 National Teaching Achievement Award (Higher Education) and the Top Class Prize of the 2022 Liaoning Teaching Achievement Award (Higher Education). He is also the recipient of numerous scientific and technological awards, including 2019 Machinery Industry Science and Technology Award, 2018 Liaoning Medical Science Award, and 2016 Chinese Medical Science Award. He currently teaches Introduction to Mechanical Engineering for undergraduate students and microfabrication and MEMS for graduate students.

Prof. Chong Liu is currently a professor at Dalian University of Technology. His main research fields include MEMS, biochemical sensors, the Internet of Things (IoT), and precision instrument and measurement. As a principle investigator, he has conducted 3 projects supported by National High Technology Research and Development Program of China, 2 projects supported by National Key Technology R&D Program, one project supported by National Basic Research Program of China, 1 major project supported by National Natural Science Foundation of China, and 3 general projects supported by National Science Foundation of China. He has obtained 2 achievements appraisement of science and technology and 62 patents. He has published 2 monographs and more than 90 journal papers. Seventy-six students have graduated from his group.

Prof. Liding Wang is an academician of the Chinese Academy of Sciences (CAS). He is an expert in precision machinery and micro/nano fabrication fields. He has published 200+ peer-reviewed journal papers and 2 books. He is the vice chairman of Chinese Society of Micro-Nano Technology (CSMNT), executive director of the China Instrument and Control Society (CIS), executive director of the Chinese Society for Measurement (CSM), and special invited director of the Chinese Mechanical Engineering Society (CMES). He has won numerous awards, including 2 Second Class Prizes and one Third Class Prize of the National Science and Technology Progress Award, 1 National Science Conference Award, and 1 Outstanding Scientist in Contemporary Instrumentation and Measurement Control Award of CIS.

Inhalt

1. Overview of micro electro mechanical systems (MEMS).- 2. Bulk silicon microprocessing technology.- 3. Surface micromachining technology.- 4. Example of silicon micromachining process.- 5. LIGA/quasi-LIGA technology.

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