Nanofabrication of Functional Ceramics

The current trend of ceramic nanotechnology has
motivated an ever-increasing need to achieve
exquisite control over size, shape, and dimensional
confinement of functional oxide architectures, in an
equivalent manner realized for semiconductors.
However, the unique nature of ceramics poses major
challenges for most traditional nanofabrication
technologies, putting the development of innovative
oxide nanopatterning schemes under the spotlight.
This book discusses major challenges for ceramic
nanofabrication and reviews patterning methods that
are suitable for this unique materials family. Stress
is laid upon the variable pressure soft-electron beam
lithography (VP-soft-eBL). Examples of ceramic
nanopatterns prepared using VP-sof-eBL are presented,
along with the strategy employed to control their
microstructure and morphology. The reported work of
building and tailoring constrained ceramic
nanostructures lays the groundwork for in-depth
exploration in the rich phenomena related to
spatial/dimensional confinement. This study should be
useful to professionals or any reader interested in
ceramic nanotechnology, nanopatterning and
general materials science fields.

Autorentext

Dr. Zixiao Pan earned her Ph.D. degree in Materials Science andEngineering at Northwestern University. She also holds MS and BSin Materials Science and Engineering from Tsinghua University,China. Currently she works as an engineering consultant atExponent Failure Analysis Associates, a leading engineeringconsulting firm in Menlo Park, CA.

Klappentext

The current trend of ceramic nanotechnology hasmotivated an ever-increasing need to achieveexquisite control over size, shape, and dimensionalconfinement of functional oxide architectures, in anequivalent manner realized for semiconductors.However, the unique nature of ceramics poses majorchallenges for most traditional nanofabricationtechnologies, putting the development of innovativeoxide nanopatterning schemes under the spotlight.This book discusses major challenges for ceramicnanofabrication and reviews patterning methods thatare suitable for this unique materials family. Stressis laid upon the variable pressure soft-electron beamlithography (VP-soft-eBL). Examples of ceramicnanopatterns prepared using VP-sof-eBL are presented,along with the strategy employed to control theirmicrostructure and morphology. The reported work ofbuilding and tailoring constrained ceramicnanostructures lays the groundwork for in-depthexploration in the rich phenomena related tospatial/dimensional confinement. This study should beuseful to professionals or any reader interested inceramic nanotechnology, nanopatterning andgeneral materials science fields.