Novel Micro-bridge Actuator For Optical Switching Application

The development of a novel micro-bridge actuator for optical switching applications is presented in this book. It covers the design, simulation, micro-fabrication, and testing of the actuator including its integration with a vertical micro-mirror. Detail studies on the buckled shape multi-layered micro-bridge actuator, its bi-stability and two-way actuation, and thermo-mechanical behaviour have been carried out during the design phase. The studies lead to formulations of a new bi-stability design methodology, buckled shape and thermo-mechanical models. Finite element analysis using ANSYS and micro-fabricated structures are used to validate the methodology and models. Micro-fabrication techniques have been developed to form the actuator, and incorporate a vertical micro-mirror with the actuator to realize a monolithically integrated optical cross-switch. The fabricated device is packaged and actuated electro-thermally to characterise its mechanical and optical switching performances. The novelty of the actuator lies in enabling intial out-of-plane deflection, which facilitates future integration of planar silica waveguides with the switch on the same substrate relatively easily.

Autorentext

Aron Michael received his PhD in Electrical Engineering in 2007 from the University of New South Wales. He has more than 30 scientific papers and two patents.Chee Yee Kwok is a Professor with the School of Electrical Engineering and telecommunication in University of New south Wales. He has more than 100 scientific papers and eleven patents.