Photolithography
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High Quality Content by WIKIPEDIA articles! Optical lithography, is a process used in microfabrication to selectively remove parts of a thin film or the bulk of a substrate. It uses light to transfer a geometric pattern from a photo mask to a light-sensitive chemical photo resist, or simply "resist," on the substrate. A series of chemical treatments then engraves the exposure pattern into the material underneath the photo resist. In complex integrated circuits, for example a modern CMOS, a wafer will go through the photolithographic cycle up to 50 times.
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GarantieWeitere Informationen
- Allgemeine Informationen
- GTIN 09786130508241
- Anzahl Seiten 124
- Genre Wärme- und Energietechnik
- Editor Lambert M. Surhone, Miriam T. Timpledon, Susan F. Marseken
- Herausgeber Betascript Publishing
- EAN 9786130508241
- Format Fachbuch
- Titel Photolithography
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