Piezoresistor Design and Applications

This book details how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. It features a case study approach that includes the design of uniaxial piezoresistors and pressure sensors.

Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications. Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The text concludes with an up-to-date discussion of the need for integrated MEMS design and opportunities to leverage new materials, processes and MEMS technology.

Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.

Provides comprehensive design guidance on piezoresistance Includes an overview of applications requirements Codifies the design of piezoresistors in MEMS Case study approach includes the design of strain gauges and uniaxial piezoresistors, displacement sensing cantilevers, and pressure sensors

Autorentext

Beth Pruitt is a young and dynamic up and coming professor and the winner of an NSF career award for her recent research work. She s now focusing piezoresistors and has observed that even though they comprise a large share of MEMS product market, there s a dearth of material available on how to design and successfully produce them. The goal of this book is to produce a practical guide to piezoresistor design using specific examples and case studies from Professor Pruitt s recent research efforts.Joey Doll is a MEMS Development Engineer at SiTime.

Klappentext

This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators.

This book also:

· Demonstrates how the latest piezoresistor models and optimization techniques can be integrated for high performance piezoresistor design

· Covers in detail piezoresistor sensitivity and noise models, signal conditioning, fabrication processes, low-power design and numerical optimization techniques

· Provides an up-to-date discussion of alternative piezoresistive materials and MEMS transduction techniques

· Explores in detail the tradeoffs in size, performance and complexity between piezoresistive sensing and popular alternatives (capacitive, piezoelectric and optical transduction)

Piezoresistor Design and Applications addresses all aspects of piezoresistor design, fabrication, modeling and optimization and is an ideal book for MEMS designers, process engineers and researchers.

Inhalt
Introduction.- Piezoresistance fundamentals.- Sensitivity, noise and resolution.- Fabrication and process modeling.- Temperature effects.- Design optimization.- Alternative materials and transduction methods.