Resist
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High Quality Content by WIKIPEDIA articles! In semiconductor fabrication, "resist" refers to both: 1. A thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. A resist can be patterned via lithography to form a (sub)micrometer-scale, temporary mask that protects selected areas of the underlying substrate during subsequent processing steps. 2. The material used to prepare said thin layer (typically a viscous solution). Resists are generally proprietary mixtures of a polymer or its precursor and other small molecules (e.g. photoacid generators) that have been specially formulated for a given lithography technology. Resists used during photolithography are called photoresists.
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GarantieWeitere Informationen
- Allgemeine Informationen
- GTIN 09786130429881
- Anzahl Seiten 88
- Genre Wärme- und Energietechnik
- Editor Lambert M. Surhone, Miriam T. Timpledon, Susan F. Marseken
- Herausgeber Betascript Publishing
- EAN 9786130429881
- Format Kartonierter Einband
- Titel Resist
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