RF MEMS Switches and Switch Circuits

The book presents the design and fabrication of RF
MEMS switches and switch circuits. It presents RF
MEMS capacitive switches and MEMS tunable filter
first ever to be produced in Norway. Modeling and
design of high speed switches and high capacitance
ratio switches are presented. Design and simulation
of tunable low pass and bandpass filters are also
described. A model for pull down voltage of a
non-uniform bridge and cantilever is also
highlighted. The fabrication of the capacitive
switches and MEMS tunable filters, conducted in the
SINTEF MiNa lab is described in details. Measurements
of pull down voltage and characterization of RF
performance for the switches and filters (low pass
and band pass) are also presented.

Autorentext

Shimul C. Saha completed his Ph.D. degree in August 2008 onelectrical engineering (focusing on RF MEMS) from NorwegianUniversity of Science and Technology (NTNU), Trondheim, Norway.Currently he is working as a postdoctoral research assistant atUniversity of Glasgow, UK. His research interest includes THzsystems, RF MEMS and microfabrication.

Klappentext

The book presents the design and fabrication of RFMEMS switches and switch circuits. It presents RFMEMS capacitive switches and MEMS tunable filterfirst ever to be produced in Norway. Modeling anddesign of high speed switches and high capacitanceratio switches are presented. Design and simulationof tunable low pass and bandpass filters are alsodescribed. A model for pull down voltage of anon-uniform bridge and cantilever is alsohighlighted. The fabrication of the capacitiveswitches and MEMS tunable filters, conducted in theSINTEF MiNa lab is described in details. Measurementsof pull down voltage and characterization of RFperformance for the switches and filters (low passand band pass) are also presented.