Silicon Sensors and Circuits

Silicon sensors integrated with readout circuits on one chip are now being considered for a wide and growing range of applications. Technological compatibility constraints and the need for economic large-scale production are now the major concerns if these devices are to become widely used in industry and medicine. This is the first book to attempt to evaluate the real prospects and limitations of integrated silicon smart sensors. It provides a thorough introduction to and review of, the field, covering both technical and economic issues critical to the future success of this technology.

Inhalt

On-chip functional integration. Development of compatible micromachining processes in silicon. Compatibility of piezoelectric zinc oxide with silicon IC processing. Economics of on-chip functional integration. On-chip functional integration in micromechanical sensors. Sensor and circuit integration in biomedical applications. Smart sensors in automobiles. Conclusions. Glossary. Index.