Spatial Light Modulators and Applications

Optical MEMS (micro-electro-mechanical systems)
devices have been used in a variety of applications
including fiber-optic communications, projection TVs
and in biomedical imaging. MEMS-based spatial light
modulators (SLM) provide a compact, large scale, and
cost-effective solution to these and other
applications. In this book, we introduce the design
and fabrication of SLMs for three such applications;
coherent communication, adaptive optics and maskless
lithography. This book should help not only those
engineers working on these applications but in other
fields, such as biomedical imaging, to better
understand SLMs and their capabilites. This should
also help optical MEMS engineers and those new to the
field to gain some knowledge on the design and
fabrication process for developing MEMS mirror arrays.

Autorentext
l Woong Jung, PhD: Studied Physics and Applied Physics at Yonsei University, Seoul, Korea with a BS and MS. Received MS and PhD in Electrical Engineering from Stanford University, Stanford, CA USA. Currently a Postdoctoral Scholar at E. L. Ginzton Labs at Stanford University.

Klappentext
Optical MEMS (micro-electro-mechanical systems) devices have been used in a variety of applications including fiber-optic communications, projection TVs and in biomedical imaging. MEMS-based spatial light modulators (SLM) provide a compact, large scale, and cost-effective solution to these and other applications. In this book, we introduce the design and fabrication of SLMs for three such applications; coherent communication, adaptive optics and maskless lithography. This book should help not only those engineers working on these applications but in other fields, such as biomedical imaging, to better understand SLMs and their capabilites. This should also help optical MEMS engineers and those new to the field to gain some knowledge on the design and fabrication process for developing MEMS mirror arrays.