Vacuum Technology

Nanotechnology has reached a level where almost every new development and even every new product uses features of nanoscopic properties of materials. As a consequence, an enormous amount of scientific instruments is used in order to synthesize and analyze new structures and materials. Due to the surface sensitivity of such materials, many of these instruments require ultrahigh vacuum that has to be provided under extreme conditions like very high voltages.

In this book, Yoshimura provides a review of the UHV related development during the last decades. His very broad experience in the design enables him to present us this detailed reference. After a general description how to design UHV systems, he covers all important issue in detail, like pumps, outgasing, Gauges, and Electrodes for high voltages.

Thus, this book serves as reference for everybody using UVH in his scientific equipment.

Reference for all users of UHV systems used in research labs Condensed view on decades of instruments' design and research Includes supplementary material: sn.pub/extras

Inhalt
Designing of Evacuation Systems.- Vacuum Pumps.- Simulation of Pressures in High-Vacuum Systems.- Outgassing.- Phenomena Induced by Electron Irradiation.- Vacuum Gauges.- Microdischarges in High Vacuum.- Emitters for Fine Electron Probes.